Acceleration of CVD Step Coverage Simulation Applied to DSMC Method.
نویسندگان
چکیده
منابع مشابه
Application of DSMC method to astrophysical flows
The Direct Simulation Monte Carlo (DSMC) method, developed originally to calculate rarefied gas dynamical problems, is applied to continuous flow including shocks assuming that the Knudsen number is sufficiently small. In particular, we study the formation of spiral shocks in the accretion disc of a close binary system. The method involves viscosity and thermal conduction automatically, and can...
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In the Direct Simulation Monte Carlo method, a combination of statistical and deterministic procedures applied to a finite number of ‘simulator’ particles are used to model rarefied gas-kinetic processes. Traditionally, chemical reactions are modelled using information from specific colliding particle pairs. In the Macroscopic Chemistry Method (MCM), the reactions are decoupled from the specifi...
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A particle approach using the Direct Simulation Monte Carlo (DSMC) method is used to solve the problem of blast impact with structures. A novel approach to model the solid boundary condition for particle methods is presented. The solver is validated against an analytical solution of the Riemann shocktube problem and against experiments on interaction of a planar shock with a square cavity. Blas...
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The study of the comet coma, or its tenuous atmosphere, is a major space application of rarefied gas dynamics, which requires modeling the gas flow in a wide range of Knudsen number. For weak to moderate comets, only the subsolar region of the coma is in a collision dominated regime. In the low density regions of the upper atmospheres of the planets and the planetary satellites and the middle t...
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Gas mixing in a T-shape micro mixer has been simulated using the Direct Simulation Monte Carlo (DSMC) method. It is considered that the adequate mixing occurs when the mass composition of the species, CO or N2, deviates below 1 % from their equilibrium composition. The mixing coefficient is defined as the ratio of the mixing length to the main channel’s height. As the inlet Kn increases, while ...
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ژورنال
عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B
سال: 1996
ISSN: 0387-5016,1884-8346
DOI: 10.1299/kikaib.62.3323